UV–Ozone Interfacial Modification in Organic Transistors for High‐Sensitivity NO2 Detection

Abstract

A new type of nitrogen dioxide (NO2) gas sensor based on copper phthalocyanine (CuPc) thin film transistors (TFTs) with a simple, low‐cost UV–ozone (UVO)‐treated polymeric gate dielectric is reported here. The NO2 sensitivity of these TFTs with the dielectric surface UVO treatment is ≈400× greater for [NO2] = 30 ppm than for those without UVO treatment. Importantly, the sensitivity is ≈50× greater for [NO2] = 1 ppm with the UVO‐treated TFTs, and a limit of detection of ≈400 ppb is achieved with this sensing platform. The morphology, microstructure, and chemical composition of the gate dielectric and CuPc films are analyzed by atomic force microscopy, grazing incident X‐ray diffraction, X‐ray photoelectron spectroscopy, and Fourier transform infrared spectroscopy, revealing that the enhanced sensing performance originates from UVO‐derived hydroxylated species on the dielectric surface and not from chemical reactions between NO2 and the dielectric/semiconductor components. This work demonstrates that dielectric/semiconductor interface engineering is essential for readily manufacturable high‐performance TFT‐based gas sensors.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 14, 2017
Source ID
10.1002/adma.201701706

Entities

People

  • Antonio Facchetti
  • Binghao Wang
  • Ferdinand S Melkonyan
  • Gang Wang
  • Junsheng Yu
  • Li Zeng
  • Michael Bedzyk
  • Shijiao Han
  • Tobin J. Marks
  • Wei Huang
  • Xinming Zhuang

Organizations

  • Air Force Office of Scientific Research
  • National Natural Science Foundation of China
  • National Science Foundation
  • Northwestern University
  • Science and Technology Department of Sichuan Province
  • University of Electronic Science and Technology of China

Tags

Fields of Study

  • Materials science

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene