Synthesis of Crystalline Black Phosphorus Thin Film on Sapphire

Abstract

Black phosphorus (BP) has recently attracted significant attention due to its exceptional physical properties. Currently, high‐quality few‐layer and thin‐film BP are produced primarily by mechanical exfoliation, limiting their potential in future applications. Here, the synthesis of highly crystalline thin‐film BP on 5 mm sapphire substrates by conversion from red to black phosphorus at 700 °C and 1.5 GPa is demonstrated. The synthesized ≈50 nm thick BP thin films are polycrystalline with a crystal domain size ranging from 40 to 70 µm long, as indicated by Raman mapping and infrared extinction spectroscopy. At room temperature, field‐effect mobility of the synthesized BP thin film is found to be around 160 cm2 V−1 s−1 along armchair direction and reaches up to about 200 cm2 V−1 s−1 at around 90 K. Moreover, red phosphorus (RP) covered by exfoliated hexagonal boron nitride (hBN) before conversion shows atomically sharp hBN/BP interface and perfectly layered BP after the conversion. This demonstration represents a critical step toward the future realization of large scale, high‐quality BP devices and circuits.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 03, 2018
Source ID
10.1002/adma.201703748

Entities

People

  • Bingchen Deng
  • Cheng Li
  • Fengnian Xia
  • Hailiang Wang
  • Judy J Cha
  • Kenji Watanabe
  • Maruf Bhuiyan
  • Michael Snure
  • Qiushi Guo
  • Shaofan Yuan
  • Takashi Taniguchi
  • Xiaolong Chen
  • Ye Wu
  • Yingwei Fei
  • Yujun Xie
  • Zishan Wu

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Japan Society for the Promotion of Science
  • National Science Foundation
  • Wuhan University of Technology
  • Yale University

Tags

Fields of Study

  • Physics

Readers

  • Nanocomposite Materials Science
  • Semiconductor Device Technology
  • Thin Film Deposition Science.