An Additive Millimeter‐Scale Fabrication Method for Soft Biocompatible Actuators and Sensors

Abstract

A hybrid manufacturing paradigm is introduced that combines pop‐up book microelectromechanical systems (MEMS) manufacturing with soft‐lithographic techniques to produce millimeter‐scale mechanisms with embedded sensing and user‐defined distributed compliance. This method combines accuracy, flexibility in material selection, scalability, and topological complexity with soft, biocompatible materials and microfluidics, paving the way for applications of soft fluid‐powered biomedical robotics. This paper proposes two classes of fully soft fluidic microactuators and two integration strategies to demonstrate the hybrid soft pop‐up actuators. Fatigue properties, blocked torque, maximum deflection, stiffness, and maximum speed are analyzed and the performance of the hybrid mechanisms is compared to their fully soft counterparts. The manufacturing approach allows integrating capacitive sensing elements in the mechanisms to achieve proprioceptive actuation. Multiple hybrid soft pop‐up actuators are combined into a multiarticulated robotic arm that is integrated with current flexible endoscopes to improve distal dexterity and enable tissue retraction in an ex vivo proof of concept experiment.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 02, 2017
Source ID
10.1002/admt.201700135

Entities

People

  • Conor J. Walsh
  • Robert J Wood
  • Sheila Russo
  • Tommaso Ranzani

Organizations

  • Defense Advanced Research Projects Agency
  • Harvard University

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Robotics and Automation.
  • Trauma Surgery or Emergency Medicine.

Technology Areas

  • AI & ML
  • Autonomy
  • Autonomy - Autonomous System Control
  • Biotechnology
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems