An All‐Silicon Metalens Integrated with a Mid‐Wave Infrared Black Phosphorus Photodiode
Abstract
Black phosphorus (BP) is a promising material for mid‐wave infrared (MWIR) photodetection because of its direct tunable bandgap and compatibility with a wide range of substrates, particularly silicon. However, optical signal collection in BP devices can be limited by its absorber thickness or active area. Dielectric metasurface lenses, which can be directly integrated into a device's substrate, are a scalable approach to increase the signal collected by BP photodetectors. This work presents the design, fabrication, and characterization of an all‐silicon metasurface lens for focusing MWIR light through its substrate. Then, a BP‐MoS2 heterojunction photodetector is integrated with the metalens, and MWIR photodetection increases at room temperature. These results demonstrate that integrated metasurface lenses are an excellent approach for boosting the performance of MWIR BP photodetectors.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 18, 2023
- Source ID
- 10.1002/adom.202301952
Entities
People
- Han Wang
- Max Lien
- Michelle Povinelli
- Nan Wang
- Sarath D. Gunapala
- Tobias Wenger
Organizations
- Army Research Office
- California Institute of Technology
- National Aeronautics and Space Administration
- University of Southern California