Fully depleted charge‐coupled device design and technology development
Abstract
We describe the advancement of fully depleted charge‐coupled device (CCD) technology for scientific applications. Recent efforts on 650–725 m‐thick CCDs for direct dark‐matter and radiation detection with single‐electron sensitivity are described, as well as the technology transfer of the fully depleted CCD technology to 200 mm‐wafer fabrication facilities.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 24, 2023
- Source ID
- 10.1002/asna.20230072
Entities
People
- S. Holland
Organizations
- Lawrence Berkeley National Laboratory
- Office of the Director of National Intelligence
- United States Department of Energy
- University of Chicago
- University of Washington