Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics
Abstract
A little more than two decades after the introduction of the first microcavity plasma devices, a growing body of commercial products based on the remarkable properties of these low‐temperature, atmospheric plasmas is now available. Following a brief review of early microplasma lamp development, this article describes microplasma‐based devices and systems currently being manufactured for applications in photolithography, photopatterning, and other nanofabrication processes, such as atomic layer deposition, spectroscopic identification and analysis of materials (including wide bandgap crystals), the disinfection of drinking water in off‐grid communities, deactivating COVID‐19 and other pathogens in air and on surfaces in public spaces, and vacuum ultraviolet lamps for driving atomic clocks. The microplasma‐based treatment of otitis media in the human ear will also be discussed.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 17, 2022
- Source ID
- 10.1002/ppap.202200075
Entities
People
- A E Mironov
- Cyrus M. Herring
- Dane S. Sievers
- J. G. Eden
- Jin H. Cho
- Jinhong Kim
- Peter P Sun
- Sehyun Park
- Sung‐jin Park
- Wenyuan Chen
- Zhihu Liang
Organizations
- Air Force Office of Scientific Research
- California Institute of Technology
- Defense Advanced Research Projects Agency
- Foundation for the National Institutes of Health
- Intel Corporation
- Lam Research
- Rice University
- United States Department of Energy
- University of Illinois Urbana–Champaign