Sharp contrast of the density and size of Ga metal droplets on photolithographically patterned GaAs (100) by droplet epitaxy under an identical growth environment

Abstract

A sharp contrast of the density and size of Ga metal droplets (MDs) on strip patterned GaAs (100) is demonstrated through droplet epitaxy (DE) and photolithography technique. As clearly evidenced by scanning electronic microscope (SEM) and atomic force microscope (AFM), MD density between etched (patterned) and un‐etched (un‐patterned) surfaces can be sharply different up to one order of magnitude under an identical growth condition. Etched surface exhibits much higher density and smaller diameter and height of MDs.

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 05, 2012
Source ID
10.1002/pssa.201127692

Entities

People

  • Eun‐soo Kim
  • Gregory J. Salamo
  • Ji Hoon Lee
  • Jiang Wu
  • Ming‐yu Li
  • Sangmin Song
  • Sang‐mo Koo
  • Yusuke Hirono
  • Zhiming Wang

Organizations

  • National Research Foundation
  • National Science Foundation
  • Office of Naval Research

Tags

Fields of Study

  • Materials science

Readers

  • Mathematics or Statistics
  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene