Growth and impurity characterization of AlN on (0001) sapphire grown by spatially pulsed MOCVD

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 12, 2016
Source ID
10.1002/pssa.201532571

Entities

People

  • Anand V. Sampath
  • Lee E. Rodak
  • Meredith L. Reed
  • Michael Wraback
  • Roy B. Chung
  • Ryan W. Enck

Organizations

  • United States Army Research Laboratory