Effect of GaN/AlGaN Buffer Thickness on the Electrothermal Performance of AlGaN/GaN High Electron Mobility Transistors on Engineered Substrates

Abstract

AlGaN/GaN high electron mobility transistors on QST engineered substrates are grown with different GaN/AlGaN buffer layer thickness. The as‐grown heterostructures are evaluated for their structural quality via atomic force microscopy, high‐resolution X‐ray diffraction, Raman spectroscopy, and steady‐state thermoreflectance. Transistor devices are fabricated and evaluated via DC and pulsed electrical techniques, as well as thermoreflectance imaging. It is reported that buffer layer thickness of at least 10 μm can result in lateral high electron mobility transistors (HEMTs) with simultaneously high GaN quality, low stress, good DC electrical performance, low current collapse, and low thermal resistance.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2023
Source ID
10.1002/pssa.202200828

Entities

People

  • Alan G Jacobs
  • Andrew D. Koehler
  • Cem Basceri
  • James Spencer Lundh
  • John Gaskins
  • Karl D. Hobart
  • Lutz Kirste
  • Marko J. Tadjer
  • Patrick Hopkins
  • Patrick Waltereit
  • Pavel L. Komarov
  • Peter E Raad
  • Stefan Müller
  • Travis J. Anderson
  • Vlad Odnoblyudov

Organizations

  • Fraunhofer Institute for Applied Solid State Physics
  • National Academies of Sciences, Engineering, and Medicine
  • Office of Naval Research Global
  • Southern Methodist University
  • United States Naval Research Laboratory
  • University of Virginia

Tags

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene