Mg‐Facilitated Growth of Cubic Boron Nitride by Ion Beam‐Assisted Molecular Beam Epitaxy

Abstract

Trace amounts of Mg deposited on a diamond (100) substrate surface facilitate the growth of cubic boron nitride (c‐BN) by ion beam‐assisted molecular beam epitaxy. Fourier transform infrared spectroscopy indicates that films grown with Mg are cubic, while those without Mg are either hexagonal BN or lacking measurable cubic or hexagonal signatures. Initiating the growth with 0.005 monolayer equivalent of Mg is sufficient to yield epitaxial films with >99% c‐BN. Reflection high energy electron diffraction, electron energy loss spectroscopy, and X‐Ray photoelectron spectroscopy indicate the surface of the film to be sp2‐bonded BN, consistent with the results of other groups. High‐resolution scanning transmission electron microscopy reveals c‐BN with a high density of stacking faults and twinning. A model is proposed by which Mg locally diminishes the energy barrier to dissociation of the as‐deposited sp2‐bonded BN, facilitating the nucleation of c‐BN.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 02, 2022
Source ID
10.1002/pssr.202200036

Entities

People

  • Andrew C. Lang
  • Bradford B. Pate
  • Chaffra A. Affouda
  • David F. Storm
  • David J. Meyer
  • Neeraj Nepal
  • Sergey I Maximenko
  • Tatyana I. Feygelson

Organizations

  • Air Force Office of Scientific Research
  • Defense Advanced Research Projects Agency
  • Office of Naval Research
  • RTX
  • United States Naval Research Laboratory

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene