Pattern induced convex corner undercutting of oriented silicon microridges in potassium hydroxide

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 07, 2015
Source ID: 10.1007/s00542-015-2684-3

Entities

People

M. Ombaba
M. Saif Islam
S. B. Inayat

Organizations

Army Research Office
National Science Foundation
University of California Office of the President