Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 20, 2016
Source ID
10.1007/s00542-016-2932-1

Entities

People

  • J. Provine
  • Kimberly L. Harrison
  • Roger T. Howe
  • William A. Clary

Organizations

  • Defense Advanced Research Projects Agency
  • Stanford University
  • Stanford University School of Engineering

Tags

Technology Areas

  • Microelectronics