Characterization and analysis of a novel structural SOI piezoresistive pressure sensor with high sensitivity and linearity

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 06, 2020
Source ID
10.1007/s00542-020-04917-3

Entities

People

  • Chuang Li
  • Francisco Cordovilla
  • José L. Ocaña
  • Libo Zhao
  • Zhen Yin

Organizations

  • Intelligence Community Postdoctoral Research Fellowship Program