Insulation of thin-film parylene-C/platinum probes in saline solution through encapsulation in multilayer ALD ceramic films
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 26, 2018
- Source ID
- 10.1007/s10544-018-0307-3
Entities
People
- Gary K. Fedder
- Mats Forssell
- O. Burak Ozdoganlar
- Rakesh Khilwani
- Xiao Chuan Ong
Organizations
- Defense Advanced Research Projects Agency