Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 16, 2018
- Source ID
- 10.1007/s10854-018-9224-8
Entities
People
- Daniel M. Potrepka
- Glen R. Fox
- He Yu
- M. Aindow
- M. Rivas
- Ronald G. Polcawich
Organizations
- United States Army