Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 22, 2020
- Source ID
- 10.1007/s10854-020-03395-7
Entities
People
- Anwar Siddique
- Chris Engdahl
- Edwin L. Piner
- Jonathan Anderson
- M. Holtz
- Raju Ahmed
- Rony Saha
Organizations
- Army Research Office
- National Science Foundation