Heteroepitaxial Growth of Germanium-on-Silicon Using Ultrahigh-Vacuum Chemical Vapor Deposition with RF Plasma Enhancement

Document Details

Document Type
Pub Defense Publication
Publication Date
May 03, 2018
Source ID
10.1007/s11664-018-6315-5

Entities

People

  • Aboozar Mosleh
  • Bader Alharthi
  • Baohua Li
  • Hameed Naseem
  • Joshua M. Grant
  • Mansour Mortazavi
  • Perry C. Grant
  • Shui-Qing Yu
  • Wei Dou
  • Wei Du

Organizations

  • Air Force Office of Scientific Research
  • National Aeronautics and Space Administration