Photogalvanic Etching of n-GaN for Three-Dimensional Electronics
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 31, 2019
- Source ID
- 10.1007/s11664-019-06982-5
Entities
People
- Daniel M Dryden
- M. Saif Islam
- Rebecca J. Nikolic
Organizations
- Army Research Office
- United States Department of Energy