Process Optimization for Selective Area Doping of GaN by Ion Implantation

Document Details

Document Type
Pub Defense Publication
Publication Date
May 28, 2021
Source ID
10.1007/s11664-021-08984-8

Entities

People

  • Alan G Jacobs
  • Boris N Feigelson
  • James C. Gallagher
  • Jennifer K Hite
  • Karl D. Hobart
  • Mark S. Goorsky
  • Michael A. Mastro
  • Michael Liao
  • Mona Ebrish
  • Travis J. Anderson
  • Yekan Wang

Organizations

  • Office of Naval Research Global