Interaction of atomic hydrogen with the surface methyl group on Si(100) — removal of surface carbon

Document Details

Document Type: Pub Defense Publication
Publication Date: Jun 01, 1992
Source ID: 10.1016/0039-6028(92)90267-a

Entities

People

C.c. Cheng
H. Gutleben
J.t. Yates Jr.
S.r. Lucas
W.j. Choyke

Organizations

Office of Naval Research