Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2022
Source ID
10.1016/j.actamat.2022.118220

Entities

People

  • Alejandro Salanova
  • Anna Costine
  • Diane A. Dickie
  • Eric R. Hoglund
  • Jacob L. Jones
  • James M. Howe
  • Jaykumar Vaidya
  • Jon Ihlefeld
  • Jon-Paul Maria
  • Katie Loughlin
  • Leah Bellcase
  • Marc H. Weber
  • Maria Gabriela Sales
  • Michael Henry
  • Nikhil Shukla
  • Patrick E Hopkins
  • Petra Reinke
  • Samantha T. Jaszewski
  • Shelby S. Fields
  • Stephen McDonnell
  • Steven L. Wolfley

Organizations

  • Army Research Office
  • National Nuclear Security Administration
  • National Science Foundation
  • North Carolina State University
  • Office of Naval Research
  • Semiconductor Research Corporation
  • United States Department of Energy