Kinetics of nitrogen incorporation at the SiO2/4H-SiC interface during an NO passivation

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2014
Source ID
10.1016/j.apsusc.2014.08.181

Entities

People

  • Alan Wan
  • Eric Garfunkel
  • Jeff Serfass
  • L. C. Feldman
  • Sarit Dhar
  • Temel Buyuklimanli
  • Wei Ou
  • Yi Xu
  • Zengjun Chen

Organizations

  • National Science Foundation
  • United States Army Research Laboratory