Effects and mechanisms of RIE on SiC inversion layer mobility and its recovery

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2015
Source ID
10.1016/j.apsusc.2014.10.113

Entities

People

  • Alberto Basile
  • Can Xu
  • Edward Conrad
  • Feng Wang
  • Gang Liu
  • L. C. Feldman
  • P. M. Mooney
  • Sarit Dhar
  • Torgny Gustafsson
  • Yi Xu

Organizations

  • National Science Foundation
  • United States Army Research Laboratory