A molecular dynamics study on stress generation during thin film growth
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 01, 2019
- Source ID
- 10.1016/j.apsusc.2018.09.253
Entities
People
- David R Jacobson
- Gregory B. Thompson
- Xiaoxiang Yu
- Xuyang Zhou
Organizations
- Army Research Office