The impact of defect density, grain size, and Cu orientation on thermal oxidation of graphene-coated Cu

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2019
Source ID
10.1016/j.apsusc.2019.02.053

Entities

People

  • Christopher J Perini
  • Dale A. Hitchcock
  • Eric M Vogel
  • Jasmine T.t. Coley
  • Katherine T. Young
  • Shelly S. Phillips
  • Steve M. Serkiz

Organizations

  • National Science Foundation
  • United States Department of Defense

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene