Low temperature epitaxy of high-quality Ge buffer using plasma enhancement via UHV-CVD system for photonic device applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2019
Source ID
10.1016/j.apsusc.2019.03.062

Entities

People

  • Aboozar Mosleh
  • Bader Alharthi
  • Baohua Li
  • Hameed Naseem
  • Joshua M. Grant
  • Mansour Mortazavi
  • Perry C. Grant
  • Shui-Qing Yu
  • Timothy A. Morgan
  • Wei Dou
  • Wei Du

Organizations

  • Air Force Office of Scientific Research
  • National Aeronautics and Space Administration