Application of seamless vertical profiles for use in the topside electron density modeling

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2007
Source ID
10.1016/j.asr.2006.09.033

Entities

People

  • B. W. Reinisch
  • Ivan Galkin
  • L. Triskova
  • V. Truhlik

Organizations

  • Air Force Research Laboratory
  • Czech Academy of Sciences
  • Ministry of Education, Youth and Sports
  • National Science Foundation

Tags

Technology Areas

  • Microelectronics