Ion dose and anneal temperature dependent studies of silicon implanted AlxGa1−xN
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2012
- Source ID
- 10.1016/j.cap.2011.05.007
Entities
People
- E.a. Moore
- Mee-yi Ryu
- Y.k. Yeo
Organizations
- Air Force Office of Scientific Research
- Ministry of Education, Science and Technology
- National Research Foundation of Korea