Water-assisted, electron-beam induced activation of carbon nanotube catalyst supports for mask-less, resist-free patterning

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2018
Source ID
10.1016/j.carbon.2018.03.042

Entities

People

  • Ahmad E Islam
  • Benjamin Davis
  • Benji Maruyama
  • Gordon Sargent
  • Jennifer Carpena-Núñez
  • Josef Brown
  • Matthew R Maschmann
  • Neil Murphy
  • Tyson Back

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene