In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2015
- Source ID
- 10.1016/j.diamond.2015.04.002
Entities
People
- Aram Rezikyan
- Franz A.m. Koeck
- Joseph Shammas
- Robert J. Nemanich
- Tianyin Sun
Organizations
- Office of Naval Research