On the doping concentration dependence and dopant selectivity of photogenerated carrier assisted etching of 4H–SiC epilayers

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2019
Source ID
10.1016/j.electacta.2019.134778

Entities

People

  • Anthony K. Boyd
  • D. Kurt Gaskill
  • Francis J. Kub
  • Karthik Sridhara
  • Kevin M. Daniels
  • Matthew T. Dejarld
  • Paul A Kohl
  • Rachael L. Myers-ward
  • Samuel G Carter
  • Shojan P. Pavunny
  • Wendy Shi

Organizations

  • Office of Naval Research
  • Office of the Secretary of Defense