NEXAFS/XPS spectra, and information depth using low energy electron spectromicroscopy in a VPPEM

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2014
Source ID
10.1016/j.elspec.2014.06.005

Entities

People

  • R. Browning

Organizations

  • Office of Small Business Innovation Research and Small Business Technology Transfer Programs

Tags

Technology Areas

  • Microelectronics