Chemical and electronic structure of composite films deposited by plasma-enhanced chemical vapor deposition from orthocarborane and pyridine source compounds

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2018
Source ID
10.1016/j.elspec.2017.12.003

Entities

People

  • A. Oyelade
  • Benjamin Hayworth
  • Bin Dong
  • D. Converse
  • E. Echeverria
  • J. Silva
  • J.a. Kelber
  • J.m. Rimsza
  • Jinfeng Du
  • M.s. Driver
  • Nan Shao
  • P.a. Dowben
  • Wai-Ning Mei
  • Yi Gao

Organizations

  • Defense Threat Reduction Agency
  • National Aeronautics and Space Administration
  • National Science Foundation

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene