Electro-thermal numerical analysis of microbolometer over various kinds of design structure under adjustable thermal conductance in the Microeletromechanical system

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2023
Source ID
10.1016/j.heliyon.2023.e14886

Entities

People

  • Kevin O. Díaz Aponte
  • Mukti Rana
  • Yanan Xu

Organizations

  • Army Research Office