Electrostatically actuated MEMS in the post-touchdown regime: The thin-dielectric limit and a novel reduced-order model for release dynamics

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 01, 2022
Source ID: 10.1016/j.ijsolstr.2022.111812

Entities

People

Nathaniel N. Goldberg
Oliver M. O'Reilly

Organizations

United States Department of Defense