A comparative study of wet etching and contacts on (2¯01) and (010) oriented β-Ga2O3

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2018
Source ID
10.1016/j.jallcom.2017.09.336

Entities

People

  • A. Kuramata
  • Fan Ren
  • Jiancheng Yang
  • Kimberly Beers
  • Kwang Hyeon Baik
  • Soohwan Jang
  • Stephen Pearton
  • Sunwoo Jung

Organizations

  • Defense Threat Reduction Agency
  • Ministry of Education of the Republic of Korea
  • Ministry of Science, ICT and Future Planning
  • National Research Foundation of Korea
  • New Energy and Industrial Technology Development Organization