Comparing amorphous silicon prepared by electron-beam evaporation and sputtering toward eliminating atomic tunneling states

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2021
Source ID
10.1016/j.jallcom.2020.157431

Entities

People

  • Battogtokh Jugdersuren
  • Frances Hellman
  • James C. Culbertson
  • Manel Molina-Ruiz
  • Matthew R. Abernathy
  • Thomas H Metcalf
  • Xiao Liu

Organizations

  • Gordon and Betty Moore Foundation
  • National Academy of Sciences
  • Office of Naval Research

Tags

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene