Level-set strategy for inverse DSA-lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2018
Source ID
10.1016/j.jcp.2018.09.021

Entities

People

  • Frédéric Gibou
  • Gaddiel Y. Ouaknin
  • Glenn H. Fredrickson
  • Kris T Delaney
  • Nabil Laachi

Organizations

  • Army Research Office
  • National Science Foundation
  • National Science Foundation Division of Mathematical Sciences