Investigations of defect evolution and basal plane dislocation elimination in CVD epitaxial growth of silicon carbide on eutectic etched epilayers

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2011
Source ID
10.1016/j.jcrysgro.2011.02.011

Entities

People

  • Haizheng Song
  • Tangali S. Sudarshan
  • Tawhid Rana

Organizations

  • Office of Naval Research