Multicycle rapid thermal annealing technique and its application for the electrical activation of Mg implanted in GaN
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 01, 2012
- Source ID
- 10.1016/j.jcrysgro.2011.12.016
Entities
People
- B.n. Feigelson
- Charles R. Eddy
- F.j. Kub
- J.k. Hite
- Jaime A. Freitas
- M. Abraham
- T.j. Anderson
Organizations
- Office of Naval Research
- United States Naval Research Laboratory