Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2015
Source ID
10.1016/j.jcrysgro.2014.10.007

Entities

People

  • Alec M. Fischer
  • Fernando A. Ponce
  • Hongen Xie
  • Md. Mahbub Satter
  • P. Douglas Yoder
  • Russell D. Dupuis
  • Shuo Wang
  • Shyh-chiang Shen
  • Theeradetch Detchprohm
  • Tsung-ting Kao
  • Xiao-hang Li
  • Yong O. Wei

Organizations

  • Georgia Research Alliance
  • United States Department of Energy