Silicon epitaxy using tetrasilane at low temperatures in ultra-high vacuum chemical vapor deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2016
Source ID
10.1016/j.jcrysgro.2016.03.018

Entities

People

  • Ayana Ghosh
  • J. Kolodzey
  • John Hart
  • Nalin Fernando
  • Ramsey Hazbun
  • Ryan Hickey
  • Stefan Zollner
  • Thomas N. Adam

Organizations

  • Air Force Office of Scientific Research
  • Air Liquide
  • Army Research Office
  • International Business Machines Corporation (Armonk, NY)
  • Telemedicine and Advanced Technology Research Center