Annealing behavior and electrical properties of atomic layer deposited PbTiO3 and PZT films
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 01, 2018
- Source ID
- 10.1016/j.jcrysgro.2018.04.004
Entities
People
- Aaron Welsh
- Daniel M. Potrepka
- Gary S. Tompa
- Jung In Yang
- Nick M. Sbrockey
- Ronald G. Polcawich
- Susan Trolier-McKinstry
Organizations
- Army Research Office