Effect of reactant gas stoichiometry of in-situ SiNx passivation on structural properties of MOCVD AlGaN/GaN HEMTs

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2019
Source ID
10.1016/j.jcrysgro.2019.03.020

Entities

People

  • Anwar Siddique
  • Edwin L. Piner
  • Jonathan Anderson
  • Raju Ahmed

Organizations

  • Army Research Office