Trapping threading dislocations in germanium trenches on silicon wafer

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2020
Source ID
10.1016/j.jcrysgro.2020.125701

Entities

People

  • Brian Albert
  • Jürgen Michel
  • Rui-tao Wen
  • Xueying Zhao

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation