Thermal conductivity of plasma-enhanced atomic layer deposited hafnium zirconium oxide dielectric thin films

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2021
Source ID
10.1016/j.jeurceramsoc.2020.12.053

Entities

People

  • Jihwan An
  • Jihyun Kim
  • Jungwan Cho
  • Sukwon Choi
  • Sungje Lee
  • Yiwen Song

Organizations

  • Air Force Office of Scientific Research
  • Ministry of Trade, Industry and Energy
  • National Research Foundation of Korea