Single step bonding of thick anodized aluminum oxide templates to silicon wafers for enhanced system-on-a-chip performance

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2020
Source ID
10.1016/j.jpowsour.2020.228643

Entities

People

  • Gibson P. Scisco
  • Katherine Haynes
  • Kevin S. Jones
  • Kirk J Ziegler

Organizations

  • United States Air Force