Parametric resonance voltage response of electrostatically actuated Micro-Electro-Mechanical Systems cantilever resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2016
Source ID
10.1016/j.jsv.2015.10.012

Entities

People

  • Dumitru I. Caruntu
  • Israel Martinez
  • Martin W. Knecht

Organizations

  • Air Force Research Laboratory

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems