On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2018
Source ID
10.1016/j.mechatronics.2018.01.012

Entities

People

  • Ethem Erkan Aktakka
  • Jong-kwan Woo
  • Kenn Richard Oldham
  • Khalil Najafi
  • Yi Chen

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation