Multilayer thin film capacitors by selective etching of Pt and Ru electrodes

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2015
Source ID
10.1016/j.mee.2014.12.004

Entities

People

  • Luke Currano
  • Shubhra Gangopadhyay
  • Steven C. Hamm

Organizations

  • Office of Naval Research